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Advanced
Macro Wafer
Defect Inspection
System
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System Feature
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- Total
solution
for
200mm
&
300mm
Wafer
defect
Inspection
- Designed
for
absolute
separation
between
Main
Frame
and
- Stage
&
Optic
(Anti-Vibration
Design)
- Cradle
Structure
for
measuring
stage
(Economical
system
size)
- Pneumatic
Isolator
installation
for
free
vibration
- Integrated
Module
design
for
Edge
Inspection
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Automated Macro defect inspection Area
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- 100%
Auto
Defect
Inspection
- Image
Display
of
whole
wafer
- All
particles,
defects
and
contamination
greater
than
0.5um
- All-surface
advanced
macro
inspection
(100%
inspection
of
whole
wafer)
- Incorporate
Top
&
Side
inspection
in
a
single
system.
- Minimum
Defect
Size
5um
- Topside
inspection
-
Patterned
and
un-patterned
wafers
-
After
develop
inspection
(ADI)
- Edge
inspection
:
Modular
Type
(Optional)
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