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SMART Search is an adaptive pattern
locating tool designed specifically to advance the
robustness and accuracy of precision alignment,
registration, and inspection applications. SMART,
which stands for Subpixel Alignment and
Registration Tool, incorporates a highly
innovative new method that has proven to be
extremely reliable in locating the position and
orientation of objects despite highly degraded
run-time patterns or images. SMART Search locates
patterns and maintains high precision despite
changes in object/pattern size, orientation,
shape, focus, or partial occlusion. By adapting to
demanding process variations while maintaining
fast and accurate pattern locating performance,
SMART Search is especially well suited for
demanding alignment applications in semiconductor
and electronics manufacturing equipment, including
CMP wafer handlers, wafer probers, wire bonders,
IC test handlers, and pick and place
machines. |